COATING DEVICE FOR DEPOSITING A COATING MATERIAL ON A SUBSTRATE

COATING DEVICE FOR DEPOSITING A COATING MATERIAL ON A SUBSTRATE

A coating device includes a vacuum chamber, a crucible, at least one spray head for preparing the coating material, and an injector tube, wherein the injector tube is designed to conduct the prepared coating material to the crucible and is connected to the crucible, wherein the at least one spray he...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHWERDT, Christian, ROCH, Teja, SCHAUER-PASS, Janine-Christina, GIORGIO, Maurizio, STRACK, Michael, ZWICK, Axel, TOPALSKI, Slavcho
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:A coating device includes a vacuum chamber, a crucible, at least one spray head for preparing the coating material, and an injector tube, wherein the injector tube is designed to conduct the prepared coating material to the crucible and is connected to the crucible, wherein the at least one spray head can be moved between an operating position, in which the spray head supplies the injector tube with the prepared coating material, and a removal position, and wherein at least one removal chamberis provided which is designed to be accessible from outside the vacuum chamber and which can be sealed off from the vacuum chamber and in which the at least one spray headin its removal position is separated from the vacuum chamber in a gas-tight manner.