METHOD FOR CONTINUOUSLY PRODUCING SILICON NITRIDE SINTERED COMPACT

Provided is a method for continuously producing a silicon nitride sintered compact for enabling a continuous production of silicon nitride sintered compacts by sintering using a silicon nitride powder having a high β-phase rate. A fired compact 1 housed in a firing jig 2 contains a silicon nitride p...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: KUSANO, Dai
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Provided is a method for continuously producing a silicon nitride sintered compact for enabling a continuous production of silicon nitride sintered compacts by sintering using a silicon nitride powder having a high β-phase rate. A fired compact 1 housed in a firing jig 2 contains a silicon nitride powder having at least 80% of β-transition rate and 7 to 20 m2/g of specific surface area together with a sintering additive, where the total content of aluminum element is adjusted not to exceed 800 ppm. The firing jig 2 is supplied into a continuous firing furnace equipped with a closed-type firing container 5 having at its end portions a supplying openable door 3 and a discharging openable door 4 for supplying and discharging the firing jig, a heating mechanism 6 provided on the body periphery of the firing container 5, a conveyance mechanism for supplying/discharging the firing jig into/from the firing container, and a gas-supplying mechanism for supplying an inert gas into the firing container, so that the silicon nitride is heated to a temperature in the range of 1200 to 1800°C in an inert gas atmosphere and at a pressure of not less than 0 MPa·G and less than 0.1 MPa·G so as to be sintered.