ACTIVE OXYGEN SUPPLY DEVICE, DEVICE FOR CONDUCTING TREATMENT BY ACTIVE OXYGEN, AND METHOD FOR CONDUCTING TREATMENT BY ACTIVE OXYGEN

Provided are an active oxygen supply device with which it is possible to more efficiently supply active oxygen to the surface of an object to be treated, a device for conducting treatment by active oxygen with which it is possible to more efficiently treat the surface of an object to be treated usin...

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Bibliographische Detailangaben
Hauptverfasser: FURUKAWA, Takumi, KANEKO, Shota, HONGO, Masatsugu, TAKASHIMA, Kenji, OZAWA, Masaki, KIKUCHI, Yuichi, YAMAUCHI, Kazuhiro
Format: Patent
Sprache:eng ; fre ; ger
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