ACTIVE OXYGEN SUPPLY DEVICE, DEVICE FOR CONDUCTING TREATMENT BY ACTIVE OXYGEN, AND METHOD FOR CONDUCTING TREATMENT BY ACTIVE OXYGEN

Provided are an active oxygen supply device with which it is possible to more efficiently supply active oxygen to the surface of an object to be treated, a device for conducting treatment by active oxygen with which it is possible to more efficiently treat the surface of an object to be treated usin...

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Bibliographische Detailangaben
Hauptverfasser: FURUKAWA, Takumi, KANEKO, Shota, HONGO, Masatsugu, TAKASHIMA, Kenji, OZAWA, Masaki, KIKUCHI, Yuichi, YAMAUCHI, Kazuhiro
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided are an active oxygen supply device with which it is possible to more efficiently supply active oxygen to the surface of an object to be treated, a device for conducting treatment by active oxygen with which it is possible to more efficiently treat the surface of an object to be treated using active oxygen, and a method for conducting treatment by active oxygen with which it is possible to more efficiently treat the surface of an object to be treated using active oxygen. An active oxygen supply device that is a plasma actuator equipped with a plasma generator and an ultraviolet light source in a housing having at least one opening, the plasma generator being provided with a first electrode and a second electrode with a dielectric in-between and creating an induced flow that contains ozone by applying a voltage between the two electrodes, in which the plasma actuator is positioned so that the induced flow flows outside the housing from an opening, and the ultraviolet light source irradiates the induced flow with ultraviolet rays and generates active oxygen in the induced flow. Additionally, a device for conducting treatment by active oxygen, and a method for conducting treatment by active oxygen.