SUBSTRATE HOLDER AND METHOD FOR FIXING AND BONDING A SUBSTRATE
A substrate holder for mounting a substrate, comprising fixing elements for fixing the substrate, wherein the fixing elements can be grouped into zones, and a corresponding method.
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Online-Zugang: | Volltext bestellen |
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| Zusammenfassung: | A substrate holder for mounting a substrate, comprising fixing elements for fixing the substrate, wherein the fixing elements can be grouped into zones, and a corresponding method. |
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