MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC SUBLAYER AND METHOD FOR DEPOSITING SAID MATERIAL

MATERIAL COMPRISING A STACK WITH A THIN ZINC-BASED OXIDE DIELECTRIC SUBLAYER AND METHOD FOR DEPOSITING SAID MATERIAL

The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metal functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), between 0.3 and 4.4 nm thick; - a dielectric underlayer of sil...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUIMARD, Denis, ORVEN, Matthieu, BARRES, Thomas
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMISTRY
GLASS
JOINING GLASS TO GLASS OR OTHER MATERIALS
METALLURGY
MINERAL OR SLAG WOOL
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:The invention relates to a material comprising a substrate (30) coated on one face (29) with a stack of thin layers (14) comprising at least one metal functional layer (140) and comprising: - an underlayer of zinc-based oxide, ZnO (129), between 0.3 and 4.4 nm thick; - a dielectric underlayer of silicon-based nitride, Si3N4 (127), between 10.0 and 50.0 nm thick; - an overlayer of zinc-based oxide, ZnO (161), between 2.0 and 10.0 nm thick; - a dielectric overlayer (165); - a capping layer of titanium-based oxide, TiOx (150), located on and in contact with said functional layer (140).