ELECTROSTATIC CAPACITANCE DETECTION DEVICE CAPABLE OF CALCULATING SHEAR FORCE

A conventional electrostatic capacitance detection device has a problem that a highly accurate pressure distribution is difficult to measure. Further, stress in the plane direction (X, Y directions) parallel to the plane, that is, shear force cannot be detected.Solution meansBy configuring an electrostatic capacitance detection device in which a first electrode is formed, an insulating layer is formed on the first electrode, and a second electrode is formed on the insulating layer, a shear force applied from above an upper portion of the second electrode can be calculated. Further, the material and configuration of the insulating layer are improved, the patterns of the first electrode and the second electrode are improved, and an individual AC drive circuit is connected to the first electrode. Thus, highly accurate measurement of the shear force can be made. Furthermore, a temperature sensor is provided so that correction by temperature can be made. In addition, by configuring a frame portion not being present in either one of two directions orthogonal to the surroundings of a sensing unit of the electrode, and thus the length can be increased.