FIELD EFFECT TRANSISTOR, ELECTRONIC APPARATUS INCLUDING THE SAME, AND METHOD OF MANUFACTURING THE FIELD EFFECT TRANSISTOR

Provided are a field effect transistor, an electronic apparatus including the same, and a method of manufacturing the field effect transistor. The field effect transistor may include a substrate; a gate electrode on the substrate; an insulating layer on the gate electrode; a source electrode on the...

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Bibliographische Detailangaben
Hauptverfasser: KWON, Junyoung, YOO, Minseok, SEOL, Minsu
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided are a field effect transistor, an electronic apparatus including the same, and a method of manufacturing the field effect transistor. The field effect transistor may include a substrate; a gate electrode on the substrate; an insulating layer on the gate electrode; a source electrode on the insulating layer; a drain electrode apart from the source electrode; a channel between the source electrode and the drain electrode and including a two-dimensional (2D) material; a 2D material electrode bonding layer adjacent to the source electrode and the drain electrode; and a stressor adjacent to the 2D material electrode bonding layer. The stressor may be configured to apply a tensile strain to the 2D material electrode bonding layer.