INSPECTION SYSTEM AND STORAGE MEDIUM

INSPECTION SYSTEM AND STORAGE MEDIUM

In an inspection system (100) that uses terahertz waves, in order to improve the inspection precision for objects (150) and the like, the inspection system (100) has an illumination unit (110) having a plurality of illumination elements (111) that radiate terahertz waves; a camera unit (120) that ca...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: GODEN, Tatsuhito, NUMATA, Aihiko, SATO, Takahiro
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:In an inspection system (100) that uses terahertz waves, in order to improve the inspection precision for objects (150) and the like, the inspection system (100) has an illumination unit (110) having a plurality of illumination elements (111) that radiate terahertz waves; a camera unit (120) that captures images of the terahertz waves that have been reflected off of an object (150) that has been irradiated by the plurality of illumination elements (111); and a control unit (160) that performs control so as to make the light emission timings for the plurality of illumination elements (111) different.