CLEANROOM AND METHOD FOR PURIFYING A CLEANROOM
A cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber, wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall, wherein each wall is provided with a plurality of openings which are arranged d...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A cleanroom comprising an inner chamber, a first outer chamber and a second outer chamber, wherein provided between the inner chamber and the first and second outer chamber is respectively a first wall and a second wall, wherein each wall is provided with a plurality of openings which are arranged distributed in a height and width direction of the wall, wherein at least two of the plurality of openings are each provided with an air control means which is configured individually to control an air flow rate through the respective opening, wherein the air control means are configured to provide the inner chamber with clean air from at least one of the first and second outer chamber in order to realize a primarily horizontal clean airflow in the inner chamber. |
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