MEASURING PROBE FOR MEASURING VARIABLES CHARACTERISTIC FOR A PLASMA

According to the invention, a measuring probe (100) for measuring variables characteristic for a plasma is provided, the measuring probe having a probe body (110) with a probe head (120), the probe body extending along a longitudinal axis of the measuring probe and being adapted to be inserted, with...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	BRENNER, Thorben, VISSING, Klaus
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TESTING
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Beschreibung
Zusammenfassung:	According to the invention, a measuring probe (100) for measuring variables characteristic for a plasma is provided, the measuring probe having a probe body (110) with a probe head (120), the probe body extending along a longitudinal axis of the measuring probe and being adapted to be inserted, with the probe head, in the plasma in order to measure variables that are characteristic for a plasma. The measuring probe further has a measuring electrode (101) which is arranged on the probe head, the probe body providing an electrical connection (102) between the measuring electrode and the probe head along a part of the measuring probe lying opposite the probe head along the longitudinal axis. The measuring probe also has a dielectric cap (103) which extends over the measuring electrode and is designed to isolate the measuring electrode from the plasma. The measuring probe is configured to generate an electric opposing field which repels negative charge carriers from the probe head.