VACUUM SYSTEM APPARATUS AND METHOD

Aspects of the present invention relate to a vacuum system. The vacuum system includes a vacuum pump; and a heat exchanger for receiving a heat transfer fluid. The heat transfer fluid comprising a gas. The heat exchanger is thermally coupled to the vacuum pump and is operable to absorb thermal energ...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAILASAM, Sivabalan, GRAY, Malcolm William
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!