VACUUM SYSTEM APPARATUS AND METHOD

Aspects of the present invention relate to a vacuum system. The vacuum system includes a vacuum pump; and a heat exchanger for receiving a heat transfer fluid. The heat transfer fluid comprising a gas. The heat exchanger is thermally coupled to the vacuum pump and is operable to absorb thermal energ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KAILASAM, Sivabalan, GRAY, Malcolm William
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Aspects of the present invention relate to a vacuum system. The vacuum system includes a vacuum pump; and a heat exchanger for receiving a heat transfer fluid. The heat transfer fluid comprising a gas. The heat exchanger is thermally coupled to the vacuum pump and is operable to absorb thermal energy from the vacuum pump. Aspects of the present invention also relate to a method of operating a vacuum system; and a controller for controlling operation of a vacuum system.