SEMICONDUCTOR DEVICE WITH A SEMICONDUCTOR CHIP BONDED BETWEEN A FIRST, PLATE-SHAPED ELECTRODE WITH A GROOVE AND A SECOND ELECTRODE

A semiconductor device (200) includes: a semiconductor chip (1a) including a first main electrode (D) on one surface thereof and a second main electrode (S) and a gate electrode on the other surface thereof; a first electrode (1g) connected to the first main electrode (D) of the semiconductor chip (1a) via a first bonding material (1p); and a second electrode (1d) connected to the second main electrode (S) of the semiconductor chip (1a) via a second bonding material (1q). The first electrode (1g) is a plate-shaped electrode and has a groove (T) in a region overlapping with the semiconductor chip (1a). The groove (T) penetrates in a thickness direction of the first electrode (1g) and reaches an end portion of the first electrode (1g) when viewed in a plan view. In this manner, a highly reliable semiconductor device (200) is provided, in which stress generated in the semiconductor chip (1a) is reduced and an increase in thermal resistance is suppressed. An end portion of the second electrode (1d) may be located so as to project, in the plan view, inside the semiconductor chip (1a), wherein the end portion of the first electrode (1g) is located so as to project, in the plan view, outside the end portion of the semiconductor chip (1a) or inside the semiconductor chip (1a). The groove (T) may have a width larger than a thickness of the first bonding material (1p), mitigating groove (T) filling with the first bonding material (1p). The groove (T) may be provided at a position overlapping with the second electrode (1d). The groove (T) may include a branched groove (T2), provided so as to communicate with the groove (T) and branched from the groove (T). The first bonding material (1p) and the second bonding material (1q) may be solders, such as a high-lead solder, a eutectic solder, a lead-free solder or a solder containing Sn as a main component, may be sintered materials using Cu or Ag or may be conductive adhesive materials in which a metal filler such as Ag, Cu or Ni is mixed with a resin. If the first bonding material (1p) and/or second bonding material (1q) is not used, the first main electrode (D) and/or the second main electrode (S) may be connected to, correspondingly, the first electrode (1g) and/or the second electrode (1d) by ultrasonic bonding or the like.