OPTICAL INTERFERENCE FILTER

In some implementations, an optical interference filter (200) includes a substrate (210); and a set of layers (220) that are disposed on the substrate. The set of layers includes a first subset of layers (230), wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a se...

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Bibliographische Detailangaben
Hauptverfasser:	HENDRIX, Karen Denise, YANG, Jinhui, OCKENFUSS, Georg J, GRIGONIS, Marius
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	In some implementations, an optical interference filter (200) includes a substrate (210); and a set of layers (220) that are disposed on the substrate. The set of layers includes a first subset of layers (230), wherein the first subset of layers comprises an aluminum nitride (AlN) material; and a second subset of layers (240), wherein the second subset of layers comprises a hydrogenated silicon (Si:H) material.