DEPLETION MODE HIGH ELECTRON MOBILITY FIELD EFFECT TRANSISTOR (HEMT) SEMICONDUCTOR DEVICE HAVING BERYLLIUM DOPED SCHOTTKY CONTACT LAYERS

A semiconductor device having a substrate, a pair of Group III-Nitride layers on the substrate forming: a heterojunction with a 2 Dimensional Electron Gas (2DEG) channel in a lower one of the pair of Group III-Nitride layers, a cap beryllium doped Group III-Nitride layer on the upper one of the pair...

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Hauptverfasser: KOLIAS, Nicholas, J, SCHULTZ, Brian, D, LOGAN, John, LEONI, Robert, E, HWANG, Kiuchul
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A semiconductor device having a substrate, a pair of Group III-Nitride layers on the substrate forming: a heterojunction with a 2 Dimensional Electron Gas (2DEG) channel in a lower one of the pair of Group III-Nitride layers, a cap beryllium doped Group III-Nitride layer on the upper one of the pair of Group III-Nitride layers; and an electrical contact in Schottky contact with a portion of the cap beryllium doped, Group III-Nitride layer.