INTEGRATED PARTICULATE MATTER SENSOR WITH CAVITY

A particulate matter (PM) sensor comprises a substrate (4) forming a cavity (5) and a light source (1) arranged in the cavity (5). The light source (1) is adapted to emit a light beam (7). Further, the particulate matter sensor comprises an optical element (2) delimiting the cavity (5) on one side....

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	GÜTLE, Frank, RÜTHEMANN, Lukas, HOPPENAU, Lukas, PUSTAN, David
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A particulate matter (PM) sensor comprises a substrate (4) forming a cavity (5) and a light source (1) arranged in the cavity (5). The light source (1) is adapted to emit a light beam (7). Further, the particulate matter sensor comprises an optical element (2) delimiting the cavity (5) on one side. The optical element (2) is adapted to shape the light beam (7), thereby forming a detection volume (8) for particulate matter (9) outside the cavity (5). Further, the particulate matter sensor comprises at least one photodetector (3) arranged on the substrate (4). The at least one photodetector (3) faces the detection volume (8) and is adapted to detect light (10) scattered by particulate matter (9) in the detection volume (8). The at least one photodetector (3) is integrated in the substrate (4).