BULK ACOUSTIC WAVE RESONATOR

A film bulk acoustic wave resonator (BAWR) comprises a bulk acoustic wave resonance unit (110) comprising a first electrode (115), a second electrode (111), and a piezoelectric layer (113) disposed between the first electrode and the second electrode; an air gap (140) disposed below the resonance un...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIN, Jea Shik, KIM, Chul Soo, KIM, Duck Hwan, SON, Sang Uk, LEE, Moon Chul, SONG, In Sang
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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