BULK ACOUSTIC WAVE RESONATOR
A film bulk acoustic wave resonator (BAWR) comprises a bulk acoustic wave resonance unit (110) comprising a first electrode (115), a second electrode (111), and a piezoelectric layer (113) disposed between the first electrode and the second electrode; an air gap (140) disposed below the resonance un...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A film bulk acoustic wave resonator (BAWR) comprises a bulk acoustic wave resonance unit (110) comprising a first electrode (115), a second electrode (111), and a piezoelectric layer (113) disposed between the first electrode and the second electrode; an air gap (140) disposed below the resonance unit; and an air edge (120, 130) formed at a distance from a center of the bulk acoustic wave resonance unit, wherein the air edge is formed in the vertical direction, and wherein the air gap is configured to reflect acoustic waves of the resonance unit in a vertical direction and the air edge is configured to reflect acoustic waves of the resonance unit in a horizontal direction. |
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