BULK ACOUSTIC WAVE RESONATOR

BULK ACOUSTIC WAVE RESONATOR

A film bulk acoustic wave resonator (BAWR) comprises a bulk acoustic wave resonance unit (110) comprising a first electrode (115), a second electrode (111), and a piezoelectric layer (113) disposed between the first electrode and the second electrode; an air gap (140) disposed below the resonance un...

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Hauptverfasser: SHIN, Jea Shik, KIM, Chul Soo, KIM, Duck Hwan, SON, Sang Uk, LEE, Moon Chul, SONG, In Sang
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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creator SHIN, Jea Shik
KIM, Chul Soo
KIM, Duck Hwan
SON, Sang Uk
LEE, Moon Chul
SONG, In Sang
description A film bulk acoustic wave resonator (BAWR) comprises a bulk acoustic wave resonance unit (110) comprising a first electrode (115), a second electrode (111), and a piezoelectric layer (113) disposed between the first electrode and the second electrode; an air gap (140) disposed below the resonance unit; and an air edge (120, 130) formed at a distance from a center of the bulk acoustic wave resonance unit, wherein the air edge is formed in the vertical direction, and wherein the air gap is configured to reflect acoustic waves of the resonance unit in a vertical direction and the air edge is configured to reflect acoustic waves of the resonance unit in a horizontal direction.
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subjects BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
title BULK ACOUSTIC WAVE RESONATOR
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