PROCESSING SYSTEM AND MEASUREMENT MEMBER

A processing system is a processing system that is configured to process an object by irradiating the object with an energy beam, and includes: a placing apparatus on which the object is placed; an irradiation apparatus that is configured to irradiate the object with the energy beam; and a light rec...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: EGAMI, Shigeki, TATSUZAKI, Yosuke
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A processing system is a processing system that is configured to process an object by irradiating the object with an energy beam, and includes: a placing apparatus on which the object is placed; an irradiation apparatus that is configured to irradiate the object with the energy beam; and a light reception apparatus that includes: a beam passing member having an attenuation area in which the energy beam is attenuated and a plurality of passing areas through each of which the energy beam is allowed to pass; and a light reception part that is configured to optically receive the energy beam that has passed through the plurality of passing areas.