PROCESS FOR MANUFACTURING A LOW-NOISE PHOTODETECTOR DEVICE IN A CDHGTE SUBSTRATE
A method for manufacturing a photodetection device, which includes the following steps:making a cadmium-rich structured coating, over a substrate of CdxHg1-xTe, and using a first etching mask; etching to enlarge the through openings of the first etching mask or the through openings of an interlayer...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A method for manufacturing a photodetection device, which includes the following steps:making a cadmium-rich structured coating, over a substrate of CdxHg1-xTe, and using a first etching mask; etching to enlarge the through openings of the first etching mask or the through openings of an interlayer etched with the structured coating, so as to form a second etching mask; injecting acceptor doping elements into the substrate, throughout the second etching mask, and activating and diffusing the acceptor doping elements to form at least one P doped region in the semiconductor substrate; selective interdiffusion annealing of cadmium, so as to form in each P doped region a cadmium-rich concentrated well with a cadmium concentration lateral gradient; and making at least one electrical contact pad, at each through opening in the structured coating. |
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