ACTUATOR, LIQUID DISCHARGE HEAD, LIQUID DISCHARGE DEVICE, AND LIQUID DISCHARGE APPARATUS

An actuator (10) includes a deformable thin-film member (102) having an opening (102a), an electromechanical conversion element (103) disposed at a periphery of the opening (102a) of the deformable thin-film member (102), an insulating film (115) covering the electromechanical conversion element, a...

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Bibliographische Detailangaben
Hauptverfasser:	MORITA, Kaname, KITAOKA, Naoko, MASUDA, Toshiaki, KURODA, Takahiko, SUZUKI, Arata
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	CORRECTION OF TYPOGRAPHICAL ERRORS i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME LINING MACHINES PERFORMING OPERATIONS PRINTING SELECTIVE PRINTING MECHANISMS STAMPS TRANSPORTING TYPEWRITERS
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Beschreibung
Zusammenfassung:	An actuator (10) includes a deformable thin-film member (102) having an opening (102a), an electromechanical conversion element (103) disposed at a periphery of the opening (102a) of the deformable thin-film member (102), an insulating film (115) covering the electromechanical conversion element, a protective film (119) over a surface of the insulating film (115), the protective film (119) covering the surface of the insulating film (115) and a surface of an electrode wiring (116, 117) connected to the electromechanical conversion element (103), and an adhesion improving film (118) disposed between the electrode wiring (116, 117) and the protective film (119).