SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

SAMPLE OBSERVATION DEVICE AND SAMPLE OBSERVATION METHOD

In a sample observation device 1, an image acquisition unit 6 acquires a plurality of pieces of XZ image data 21 of a sample S in a Y-axis direction, and an image generation unit 8 generates luminance image data 31 on luminance of the sample S on the basis of the plurality of pieces of XZ image data...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMAMOTO Satoshi, MATSUBARA Masanori
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:In a sample observation device 1, an image acquisition unit 6 acquires a plurality of pieces of XZ image data 21 of a sample S in a Y-axis direction, and an image generation unit 8 generates luminance image data 31 on luminance of the sample S on the basis of the plurality of pieces of XZ image data 21, binarizes luminance values of each of the plurality of pieces of XZ image data 21 to generate a plurality of pieces of binarized XZ image data 25, and generates area image data 32 on an existing area of the sample S on the basis of the plurality of pieces of binarized XZ image data 25.