SUBSTRATE TRAY TRANSFER SYSTEM FOR SUBSTRATE PROCESS EQUIPMENT

SUBSTRATE TRAY TRANSFER SYSTEM FOR SUBSTRATE PROCESS EQUIPMENT

A method and apparatus for a transfer robot for a substrate processing system is provided that includes a transfer chamber coupled to a plurality of processing chambers. The transfer chamber comprises a transfer robot comprising a base coupled to a support stem, and a tray cassette fixed to the base...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHAE, Yong Kee, ABE, Shinobu, SHIN, Chang Hee, KOWAKA, Masahiko, KURITA, Shinichi
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method and apparatus for a transfer robot for a substrate processing system is provided that includes a transfer chamber coupled to a plurality of processing chambers. The transfer chamber comprises a transfer robot comprising a base coupled to a support stem, and a tray cassette fixed to the base, wherein the tray cassette comprises a first tray carrier for holding and transferring a first tray from the tray cassette to a susceptor in one of the plurality of processing chambers and a second tray carrier stacked on the first tray carrier, the second tray carrier for holding a second tray, wherein each of the first tray carrier and the second tray carrier includes a plurality of friction reducing devices.