ORGANIC VAPOR JET PRINT HEAD WITH ORTHOGONAL DELIVERY AND EXHAUST CHANNELS

Embodiments of the disclosed subject matter provide a device that has a first depositor that includes an array of circular or elliptical delivery apertures arranged in rows of 4 or 5, surrounded by one or more exhaust apertures, where the delivery apertures and the one or more exhaust apertures are...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: QUINN, William E, MCGRAW, Gregory, KING, Matthew
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Embodiments of the disclosed subject matter provide a device that has a first depositor that includes an array of circular or elliptical delivery apertures arranged in rows of 4 or 5, surrounded by one or more exhaust apertures, where the delivery apertures and the one or more exhaust apertures are enclosed within a perimeter of a boss that protrudes from a substrate-facing side of the one or more delivery apertures. The delivery channels for the one or more delivery apertures and exhaust channels for the one or more exhaust apertures may be routed orthogonally to each other. The one or more delivery apertures may be configured to permit jets of delivery gas pass through a lower surface of the first depositor. The lower surface of the first depositor may include the one or more exhaust apertures to remove surplus vapor from a delivery zone. Embodiments may also provide a method of forming a print head.The boss is surrounded by recesses allowing free flow of confinement gas between depositors.