IMAGING SYSTEM

A plate for use in an imaging system to determine two optical properties of an illumination beam of the imaging system, the imaging system configured to illuminate an illumination region with the illumination beam, the plate comprising a plurality of markers, wherein a first subset of the plurality...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SWINKELS, Gerardus Hubertus Petrus Maria, IMPONENTE, Giovanni, ENGELEN, Wouter Joep, HARTGERS, Albertus, VAN DE KERKHOF, Marcus Adrianus, STEEGHS, Marco Matheus Louis, PLANTZ, Nicholas William Maria
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A plate for use in an imaging system to determine two optical properties of an illumination beam of the imaging system, the imaging system configured to illuminate an illumination region with the illumination beam, the plate comprising a plurality of markers, wherein a first subset of the plurality of markers comprises a first type of markers for determining a first optical property of the illumination beam, a second subset of the plurality of markers comprises a second type of markers for determining a second optical property of the illumination beam, the plurality of markers are located within a marker region of the plate and the marker region generally corresponds to the illumination region.