MACHINING APPARATUS

The present invention aims at eliminating a need for a protective cover such as a bellows cover and improving a collection rate of machining scraps, and includes machining tables 2A and 2B that are fixed at least in X and Y directions on a horizontal plane and hold a workpiece W, a machining mechani...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SHIRAI, Katsumasa, HORI, Satoko, AZUMA, Hidekazu, FUKAI, Motoki
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention aims at eliminating a need for a protective cover such as a bellows cover and improving a collection rate of machining scraps, and includes machining tables 2A and 2B that are fixed at least in X and Y directions on a horizontal plane and hold a workpiece W, a machining mechanism 3 that machines the workpiece W with a rotary tool 30 using a machining liquid, a moving mechanism 5 that linearly moves the machining mechanism 3 at least in each of the X and Y directions on the horizontal plane, and a machining scrap storage unit 9 that is provided below the machining tables 2A and 2B and stores machining scraps S generated by machining by the machining mechanism 3.