NEUTRON DETECTORS AND METHODS OF FABRICATING THE SAME USING BORON AS NEUTRON CONVERSION LAYER AND CONFORMAL DOPING SOURCE

NEUTRON DETECTORS AND METHODS OF FABRICATING THE SAME USING BORON AS NEUTRON CONVERSION LAYER AND CONFORMAL DOPING SOURCE

Thermal neutron detectors and methods of fabricating the same are provided. A thermal neutron detector can use boron in both the neutron conversion layer and as a source for conformal doping in a semiconductor substrate. The neutron detector can be a micro-structured diode with cavities having a dep...

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Bibliographische Detailangaben
Hauptverfasser: QUEVEDO LOPEZ, Manuel, CARAVEO FRESCAS, Jesus Alfonso, AVILA-AVENDANO, Carlos Hugo, NANDAGOPALA KRISHNAN, Siddartha Srinivasan
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Zusammenfassung:Thermal neutron detectors and methods of fabricating the same are provided. A thermal neutron detector can use boron in both the neutron conversion layer and as a source for conformal doping in a semiconductor substrate. The neutron detector can be a micro-structured diode with cavities having a depth of 60 microns or less. The boron can be filled in the cavities and diffused into the semiconductor substrate via a diffusion annealing process.