SENSING SYSTEM INCLUDING LAYERED MICROPROBE

A sensing system includes a microprobe, the microprobe including: a layered structure including: a sensing unit comprising a sensor including a working electrode, wherein the sensing unit has a first perimeter when viewed along a layering direction, includes a first material having a first toughness...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAMIR, Idan, MASASA, Hila, LEFLER, Sharon, SCHREIBER, David
Format: Patent
Sprache:eng ; fre ; ger
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