SENSING SYSTEM INCLUDING LAYERED MICROPROBE
A sensing system includes a microprobe, the microprobe including: a layered structure including: a sensing unit comprising a sensor including a working electrode, wherein the sensing unit has a first perimeter when viewed along a layering direction, includes a first material having a first toughness...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A sensing system includes a microprobe, the microprobe including: a layered structure including: a sensing unit comprising a sensor including a working electrode, wherein the sensing unit has a first perimeter when viewed along a layering direction, includes a first material having a first toughness, and including a first side and a second side; a deformable layer configured to deform under stress and positioned on the first side of the sensing unit; a ductile layer positioned on the deformable layer opposite the sensing unit and having a second perimeter when viewed along the layering direction, the first perimeter being within the second perimeter, the ductile layer including a second material having a second toughness greater than the first toughness; a sensor-interface layer positioned on the second side of the sensing unit; and an encapsulant partially encapsulating the layered structure and mechanically isolating the layered structure from a surrounding environment. |
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