SENSING SYSTEM INCLUDING LAYERED MICROPROBE

A sensing system includes a microprobe, the microprobe including: a layered structure including: a sensing unit comprising a sensor including a working electrode, wherein the sensing unit has a first perimeter when viewed along a layering direction, includes a first material having a first toughness...

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Bibliographische Detailangaben
Hauptverfasser: TAMIR, Idan, MASASA, Hila, LEFLER, Sharon, SCHREIBER, David
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A sensing system includes a microprobe, the microprobe including: a layered structure including: a sensing unit comprising a sensor including a working electrode, wherein the sensing unit has a first perimeter when viewed along a layering direction, includes a first material having a first toughness, and including a first side and a second side; a deformable layer configured to deform under stress and positioned on the first side of the sensing unit; a ductile layer positioned on the deformable layer opposite the sensing unit and having a second perimeter when viewed along the layering direction, the first perimeter being within the second perimeter, the ductile layer including a second material having a second toughness greater than the first toughness; a sensor-interface layer positioned on the second side of the sensing unit; and an encapsulant partially encapsulating the layered structure and mechanically isolating the layered structure from a surrounding environment.