SENSOR DEVICE

A sensor device (1) according to the present disclosure includes: a Peltier element (20); a sensor element (10) thermally connected to a cooling surface (21a) of the Peltier element (20); and a package substrate (40) that is made of ceramic, is thermally connected to a heat dissipation surface (23a)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: TAGUCHI, Kenichi, WAKABAYASHI, Takahiro
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:A sensor device (1) according to the present disclosure includes: a Peltier element (20); a sensor element (10) thermally connected to a cooling surface (21a) of the Peltier element (20); and a package substrate (40) that is made of ceramic, is thermally connected to a heat dissipation surface (23a) of the Peltier element (20), and accommodates the Peltier element (20) and the sensor element (10).