REFLECTIVE POLARIZED LIGHT SEPARATION AND DIFFRACTION ELEMENT AND OPTICAL MEASUREMENT DEVICE COMPRISING SAME

The present invention provides a reflective polarized light separation and diffraction element that is usable over a broad wavelength region including an ultraviolet region, and an optical system measurement device comprising the same. This reflective polarized light separation and diffraction eleme...

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Bibliographische Detailangaben
Hauptverfasser: MIYOSHI Yuichi, EMOTO Akira, FUKUDA Takashi, HAYAKAWA Hiroshi, NARITA Yoshihito
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present invention provides a reflective polarized light separation and diffraction element that is usable over a broad wavelength region including an ultraviolet region, and an optical system measurement device comprising the same. This reflective polarized light separation and diffraction element comprises: a substrate (1); a reflection surface (2) formed on a surface of the substrate (1); and a lattice structure body (3) provided on the reflection surface (2) and indicating the structural birefringence (Δ n∗). The lattice structure body (3) is made from four patterned lattice structure bodies (3A, 3B, 3C and 3D) each having a lattice structure with a different azimuth angle. The plurality of patterned lattice structure bodies (3A, 3B, 3C and 3D) are lined up in a prescribed direction on the reflection surface (2) such that the azimuth angles of the lattice structures change in a structurally cyclical manner.