TRANSPARENT SUBSTRATE PROVIDED WITH MULTILAYER FILM

The present invention pertains to a transparent substrate provided with a multilayer film, the transparent substrate being such that a multilayer film obtained by stacking a metal oxide layer and a silicon oxide layer in the stated order is provided to at least one main surface of a transparent subs...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI Daisuke, NISHIKAWA Yasuhisa
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:The present invention pertains to a transparent substrate provided with a multilayer film, the transparent substrate being such that a multilayer film obtained by stacking a metal oxide layer and a silicon oxide layer in the stated order is provided to at least one main surface of a transparent substrate having two main surfaces, SiOx in at least one silicon oxide layer within the multilayer film satisfies the relationship 1.55 ≤ x < 2.00, the luminous transmittance of the multilayer film is 20-89%, and the resistance value is 104 Ω/□ or higher. The x in SiOx is a value derived by depth-direction compositional analysis in X-ray photoelectron spectroscopy (XPS) in which argon ion sputtering is used.