SYSTEMS, METHODS, AND APPARATUSES FOR IMMERSION MEDIA APPLICATION AND LENS CLEANING

An imaging system configured for automatic application and/or removal of immersion media can include (i) a sample stage, (ii) an imaging assembly disposed on a first side of the sample stage and having an immersion objective configured to selectively align with an optical axis of the imaging system,...

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Bibliographische Detailangaben
Hauptverfasser: ACHTERMANN, Andreas, DAUM, Rainer, VOEGELE, Xaver, BOTTARO, Thierry
Format: Patent
Sprache:eng ; fre ; ger
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