SYSTEMS, METHODS, AND APPARATUSES FOR IMMERSION MEDIA APPLICATION AND LENS CLEANING

SYSTEMS, METHODS, AND APPARATUSES FOR IMMERSION MEDIA APPLICATION AND LENS CLEANING

An imaging system configured for automatic application and/or removal of immersion media can include (i) a sample stage, (ii) an imaging assembly disposed on a first side of the sample stage and having an immersion objective configured to selectively align with an optical axis of the imaging system,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ACHTERMANN, Andreas, DAUM, Rainer, VOEGELE, Xaver, BOTTARO, Thierry
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:An imaging system configured for automatic application and/or removal of immersion media can include (i) a sample stage, (ii) an imaging assembly disposed on a first side of the sample stage and having an immersion objective configured to selectively align with an optical axis of the imaging system, and (iii) an applicator positioned to selectively interact with a lens surface of the immersion objective to deposit or remove immersion media.