CHARGED PARTICLE IRRADIATION DEVICE, SYSTEM, METHOD, AND PROGRAM

There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state dete...

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Hauptverfasser: HIYOSHI, Isao, TAKEUCHI, Ryuichi, TAKAKI, Koichi, TAKAHASHI, Katsuyuki, KUBO, Katsuya, YAMAGUCHI, Shinichi, KIM, Chyon Hae, KANETA, Yuki, NAGATA, Hidemi
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state detection unit configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted, an emission time generation unit configured to generate an emission time based on a past emission time of charged particles and a charged state of the charged object after the emission, an emission unit configured to emit charged particles to the charged object which is in the pre-emission charged state based on the generated emission time, a post-emission state detection unit configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted, a machine learning unit configured to cause a machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generation unit, and a completion determination unit configured to repeatedly operate the pre-emission state detection unit, the emission time generation unit, the emission unit, the post-emission state detection unit, and the learning unit until the machine learning model satisfies a learning completion condition.