CHARGED PARTICLE IRRADIATION DEVICE, SYSTEM, METHOD, AND PROGRAM
There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state dete...
Gespeichert in:
Hauptverfasser: | , , , , , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; fre ; ger |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | There is provided a charged particle emission device that can quickly respond to a change in a charged object or environment even during the operation of the device and can adaptively emit charged particles. There is provided a charged particle emission device that includes a pre-emission state detection unit configured to detect a pre-emission charged state which is a charged state of the charged object before charged particles are emitted, an emission time generation unit configured to generate an emission time based on a past emission time of charged particles and a charged state of the charged object after the emission, an emission unit configured to emit charged particles to the charged object which is in the pre-emission charged state based on the generated emission time, a post-emission state detection unit configured to detect a post-emission charged state which is a charged state of the charged object after the charged particles are emitted, a machine learning unit configured to cause a machine learning model to learn a correspondence among the pre-emission charged state, the post-emission charged state, and the emission time generated by the emission time generation unit, and a completion determination unit configured to repeatedly operate the pre-emission state detection unit, the emission time generation unit, the emission unit, the post-emission state detection unit, and the learning unit until the machine learning model satisfies a learning completion condition. |
---|