PRESSURE SENSOR
A pressure sensor includes a housing (20), an isolator (26) positioned at a first end (22) of the housing, and a first cavity (28) formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity (42) formed in the housing and a channel (48) with a f...
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| Format: | Patent |
| Sprache: | eng ; fre ; ger |
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| Zusammenfassung: | A pressure sensor includes a housing (20), an isolator (26) positioned at a first end (22) of the housing, and a first cavity (28) formed between the first end of the housing and the isolator. The pressure sensor further includes a second cavity (42) formed in the housing and a channel (48) with a first end (50) fluidly connected to the first cavity and a second end (52) fluidly coupled to the second cavity. A pressure sensor chip (62) is positioned in the second cavity and includes a first diaphragm (68) positioned at a top side of the pressure sensor chip laterally outwards from the second end of the channel. |
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