FABRICATION OF PIEZOELECTRIC DEVICE WITH PMNPT LAYER

FABRICATION OF PIEZOELECTRIC DEVICE WITH PMNPT LAYER

A piezoelectric device includes a substrate, a thermal oxide layer on the substrate, a metal or metal oxide adhesion layer on the thermal oxide layer, a lower electrode on the metal oxide adhesion layer, a seed layer on the lower electrode, a lead magnesium niobate-lead titanate (PMNPT) piezoelectri...

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Bibliographische Detailangaben
Hauptverfasser: PAI, Uday, RAMAKRISHNAN, Bharatwaj, SANGLE, Abhijeet Laxman, XUE, Yuan, KADAM, Ankur, SHARMA, Vijay Bhan
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:A piezoelectric device includes a substrate, a thermal oxide layer on the substrate, a metal or metal oxide adhesion layer on the thermal oxide layer, a lower electrode on the metal oxide adhesion layer, a seed layer on the lower electrode, a lead magnesium niobate-lead titanate (PMNPT) piezoelectric layer on the seed layer, and an upper electrode on the PMNPT piezoelectric layer.