METHOD FOR LASER PROCESSING A WORKPIECE, OPTICAL PROCESSING SYSTEM, AND LASER PROCESSING DEVICE

A method for laser processing of a workpiece includes splitting a pulsed laser beam among a plurality of partial beams. Each partial beam has one of two different polarization states. The method further includes processing the workpiece by focusing the plurality of partial beams into a plurality of...

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Bibliographische Detailangaben
Hauptverfasser: KUMKAR, Malte, FLAMM, Daniel
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:A method for laser processing of a workpiece includes splitting a pulsed laser beam among a plurality of partial beams. Each partial beam has one of two different polarization states. The method further includes processing the workpiece by focusing the plurality of partial beams into a plurality of at least partially overlapping partial regions of a continuous interaction region. Partial beams having different polarization states are focused into adjacent partial regions of the continuous interaction region.