METHOD FOR LASER PROCESSING A WORKPIECE, OPTICAL PROCESSING SYSTEM, AND LASER PROCESSING DEVICE
A method for laser processing of a workpiece includes splitting a pulsed laser beam among a plurality of partial beams. Each partial beam has one of two different polarization states. The method further includes processing the workpiece by focusing the plurality of partial beams into a plurality of...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A method for laser processing of a workpiece includes splitting a pulsed laser beam among a plurality of partial beams. Each partial beam has one of two different polarization states. The method further includes processing the workpiece by focusing the plurality of partial beams into a plurality of at least partially overlapping partial regions of a continuous interaction region. Partial beams having different polarization states are focused into adjacent partial regions of the continuous interaction region. |
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