SEAL INSPECTION DEVICE AND SEAL INSPECTION METHOD

An object is to implement seal inspection with a simple structure and to enable the inspection to be performed with higher accuracy and in a shorter time than in the conventional case.A seal inspection device includes: a first holder (11) including a port (101) surrounded by an inspection target (20...

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Bibliographische Detailangaben
Hauptverfasser:	KASAI, Yuta, SAKURAI, Takayuki, KARUBE, Shotaro, TADANO, Hikaru, TAKEKOSHI, Masashi
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRICITY MEASURING PHYSICS PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	An object is to implement seal inspection with a simple structure and to enable the inspection to be performed with higher accuracy and in a shorter time than in the conventional case.A seal inspection device includes: a first holder (11) including a port (101) surrounded by an inspection target (20), and a through hole connected to an outside-leak detection flow path (104); a second holder (12) holding the inspection target (20) between the first and second holders (11 and 12); an inspection-place sealing portion (30) forming, into a closed space, a space where the inspection target (20) is arranged, in cooperation with the first and second holders (11 and 12); a pressurization valve (111) connecting the port (101) to both a supply source of an inspection gas and an exhaust system; a detector for the inspection gas; a first measurement valve (121) connecting the detector to the port (101); and a second measurement valve (124) connecting the outside-leak detection flow path (104) to the detector.