METHODS AND SYSTEMS FOR IDENTIFYING FEATURES

Aspects of the present disclosure include methods, apparatuses, and computer readable media for transmitting a light such that it is incident on a multi-layer stack, wherein the multi-layer stack includes the feature and a region without the feature, detecting a narrow-band light from the feature an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GIBBS, Markelle L, BRAVO MORA, Enrique, KAYES, Brendan M, ZAND, Katayoun, WOO, Howard, FRANCE, Christopher E, KUMAR, Vineet
Format: Patent
Sprache:eng ; fre ; ger
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Beschreibung
Zusammenfassung:Aspects of the present disclosure include methods, apparatuses, and computer readable media for transmitting a light such that it is incident on a multi-layer stack, wherein the multi-layer stack includes the feature and a region without the feature, detecting a narrow-band light from the feature and the region without the feature, wherein the feature has a first optical response in response to a wavelength of the narrow-band light and the region without the feature has a second optical response in response to the wavelength of the narrow-band light, and generating, based on the narrow-band light, an image indicative of where the first optical response and the second optical response occur on the multi-layer stack.