AN EXTREMUM SEEKING CONTROL APPARATUS AND METHOD FOR AUTOMATIC FREQUENCY TUNING FOR RF IMPEDANCE MATCHING

A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source....

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Bibliographische Detailangaben
Hauptverfasser:	BURRY, Aaron, KLEIN, Jesse, RADOMSKI, Aaron, TOE, Aung
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS PULSE TECHNIQUE RESONATORS
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Beschreibung
Zusammenfassung:	A radio frequency (RF) generator includes a RF power source configured to generate an output signal at an output frequency. The RF generator includes a frequency tuning module. The frequency tuning module generates a frequency control signal that controls the output frequency of the RF power source. The frequency control signal includes a frequency tuning signal component and a perturbation signal component. The perturbation signal varies an electrical parameter of the output signal. The frequency tuning signal is adjusted in accordance with a change in output signal in response to the perturbation signal.