ANALYZER AND IMAGE PROCESSING METHOD

In an analyzer (100), an image processing unit (64) performs processing of: dividing a measurement image (E) into a plurality of partial measurement images (EP), and dividing a reference image (R) into a plurality of partial reference images (RP); calculating a positional deviation amount of each of...

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Bibliographische Detailangaben
Hauptverfasser: TSUKAMOTO, Kazunori, HONDA, Shigeru
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:In an analyzer (100), an image processing unit (64) performs processing of: dividing a measurement image (E) into a plurality of partial measurement images (EP), and dividing a reference image (R) into a plurality of partial reference images (RP); calculating a positional deviation amount of each of the partial measurement images (RP) relative to a corresponding partial reference image (R) among the partial reference images (RP); determining whether or not the positional deviation amount is a threshold or less; and correcting positional deviation of the measurement image (E) based on the positional deviation amounts of the plurality of partial measurement images (RP) when the image processing unit (64) has determined that the positional deviation amount is not the threshold or less. The processing of dividing for an Mth time includes processing of: determining whether or not a size of each of the partial measurement images in the processing of dividing for an M-lth time is a reference size or less; and making an overlapping amount of adjacent partial measurement images among the partial measurement images to be larger than the overlapping amount in the processing of dividing for the M-lth time when the image processing unit (64) has determined that the size of each of the partial measurement images for the M-lth time is the reference size or less.