FLOW RATE CONTROLLER AND DRIVE DEVICE EQUIPPED WITH SAME
A flow rate controller (12) and a drive device (10) are provided with: a cylinder flow passage (21) connected to an air cylinder (14); a main flow passage (22) for supplying air to and discharging air from the air cylinder (14); an auxiliary flow passage (23) that has a first throttle valve (24) and...
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Format: | Patent |
Sprache: | eng ; fre ; ger |
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Zusammenfassung: | A flow rate controller (12) and a drive device (10) are provided with: a cylinder flow passage (21) connected to an air cylinder (14); a main flow passage (22) for supplying air to and discharging air from the air cylinder (14); an auxiliary flow passage (23) that has a first throttle valve (24) and through which exhaust air discharged from the air cylinder (14) passes with a smaller flow rate than that of the main flow passage (22); a switch valve (26) that switches between a first position in which the cylinder flow passage (21) communicates with the main flow passage (22) and a second position in which the cylinder flow passage (21) communicates with the auxiliary flow passage (23); and a pilot air adjustment part (30) that guides a portion of the exhaust air from the air cylinder (14) as pilot air to the switch valve (26). |
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