CATHODE MEMBER FOR ELECTRON BEAM GENERATION AND METHOD FOR PRODUCING SAME

The cathode member for electron beam generation of the present disclosure includes: 95% by area or more of a single phase or two phases of a compound composed of iridium and cerium. A total content of one or more subcomponents of metallic iridium and an oxide of one or more elements of iridium and c...

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Bibliographische Detailangaben
Hauptverfasser: TAKAGI, Toshiaki, KUDO, Fumiaki, KUSAMICHI, Tatsuhiko, KOGA, Kenji
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:The cathode member for electron beam generation of the present disclosure includes: 95% by area or more of a single phase or two phases of a compound composed of iridium and cerium. A total content of one or more subcomponents of metallic iridium and an oxide of one or more elements of iridium and cerium is 5% by area or less of the cathode member.