DATA ACQUISITION AND PROCESSING TECHNIQUES FOR THREE-DIMENSIONAL RECONSTRUCTION

Apparatuses and processes for generating data for three-dimensional reconstruction are disclosed herein. An example method at least includes exposing a subsequent surface of a sample, acquiring an image of the subsequent surface, comparing the image of the subsequent surface to an image of a reference surface, based on the comparison exceeding a threshold, acquiring a compositional or crystalline map of the subsequent surface, and based on the comparison not exceeding the threshold, exposing a next surface. Such method of the type slice-and-view allows to reduce the overall processing time of the reconstruction since the compositional or crystalline map of a subsequent surface is measured only if the corresponding image shows significant changes. Artificial neural networks are used to propagate the compositional or crystalline map information for slices where no map has been measured.