CAPACITOR STRUCTURE WITH VIA EMBEDDED IN POROUS MEDIUM

CAPACITOR STRUCTURE WITH VIA EMBEDDED IN POROUS MEDIUM

A capacitor structure is disclosed. The capacitor structure includes a substrate (102); a conductive layer (104) above the substrate (102); and a porous layer, above the conductive layer (104), having pores that extend perpendicularly from a top surface of the porous layer toward the conductive laye...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: EL SABAHY, Julien, VOIRON, Frédéric, SOULIER, Brigitte
Format: Patent
Sprache:eng ; fre ; ger
Schlagworte:
BASIC ELECTRIC ELEMENTS
CAPACITORS
CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
ELECTRICITY
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Beschreibung
Zusammenfassung:A capacitor structure is disclosed. The capacitor structure includes a substrate (102); a conductive layer (104) above the substrate (102); and a porous layer, above the conductive layer (104), having pores that extend perpendicularly from a top surface of the porous layer toward the conductive layer (104). The porous layer comprises a first region (110) in which pores conductive wires are disposed, and a second region (120) in which pores a metal-insulator-metal (MIM) structure is disposed. The first region (110) may be used as a via to contact a bottom electrode of the capacitor structure.