CANTILEVER, SCANNING PROBE MICROSCOPE, AND MEASUREMENT METHOD USING SCANNING PROBE MICROSCOPE

To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever 40 includes a vertex portion 2 that is a portion close to a sample and is covered by a metallic film 7, a ridge 4 that is connected to the vertex portion 2 and is covered by the metallic fi...

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Bibliographische Detailangaben
Hauptverfasser:	HIROSE, Takenori, ZHANG, Kaifeng, SAEKI, Tomonori
Format:	Patent
Sprache:	eng ; fre ; ger
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	To enhance the measurement sensitivity of a scanning probe microscope. In a cross sectional view, a cantilever 40 includes a vertex portion 2 that is a portion close to a sample and is covered by a metallic film 7, a ridge 4 that is connected to the vertex portion 2 and is covered by the metallic film 7, and an upper corner portion 5 that is connected to the ridge 4. Here, the upper corner portion 5 and a part of the ridge 4 are portions to be irradiated with excitation light 8 emitted from a light source of the scanning probe microscope.