THREE DIMENSIONAL INTEGRATED SEMICONDUCTOR ARCHITECTURE AND METHOD OF MANUFACTURING THE SAME

Provided is a semiconductor architecture including a carrier substrate (100), alignment marks (10) provided in the carrier substrate (100), the alignment marks (10) being provided from a first surface of the carrier substrate (100) to a second surface of the carrier substrate (100), a first semicond...

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Bibliographische Detailangaben
Hauptverfasser: KIM, Kiil, SEO, Kangill, CHO, Seokwon
Format: Patent
Sprache:eng ; fre ; ger
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Zusammenfassung:Provided is a semiconductor architecture including a carrier substrate (100), alignment marks (10) provided in the carrier substrate (100), the alignment marks (10) being provided from a first surface of the carrier substrate (100) to a second surface of the carrier substrate (100), a first semiconductor device (200a) provided on the first surface of the carrier substrate (100) based on the alignment marks (10), a second semiconductor device (200b) provided on the second surface of the carrier substrate (100) based on the alignment marks (10) and aligned with the first semiconductor device (200a).